Nova NanoSEM 450 Scanning Electron Microscope
The Nova NanoSEM 450 (FEI) is a modern field-emission scanning electron microscope with 1 nm ultimate resolution, large sample chamber with, advanced motorized stage, and navigation supported by an in-chamber camera. High- and low-vacuum operations are possible. Several detectors (ETD, TLD, LVD, GAD, STEM II) are available to observe secondary and backscattered electrons under various conditions and also to obtain STEM images. The microscope is also equipped with an EDS detector for elemental composition analysis (EDAX), Elphy Plus nanolithography station (Raith) and a set of piezoelectric MiBot micromanipulators (Imina).
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